Introducing a compact tabletop type device that can add automatic transport functionality to existing microscopes!
This product is a compact tabletop device that can add an automatic transport function to existing microscopes.
It supplies and retrieves wafers on the microscope stage. The wafer replacement is automatically performed by moving the microscope stage to a designated position.
If the microscope has a control system, it can also be linked as a higher-level system.
【Features】
■ Compatible with 5 and 6-inch wafers
■ Can add an automatic transport function to existing microscopes
■ A device that supplies and retrieves wafers on the microscope stage
■ Wafer replacement is automatically performed by moving the microscope stage to a designated position
■ If the microscope has a control system, it can be linked as a higher-level system (optional)
*For more details, please refer to the PDF document or feel free to contact us.